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We're turning
MEMS ideas
into reality
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MEMS Foundry Services
D&S Redmond |
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MEMSplus! Mission:
Provide superior turn-around time, customer response, and quality of work for all types of MEMS devices.
MEMSplus!
Services is an ideal partner for accelerating your MEMS design development to market.
It's our business to help our customers turn MEMS ideas into reality - any step of the way...
Complex, precise MEMS product development requires more than a clean room, processing equipment and skilled operators. Over the past 10 years, Honeywell has established a portfolio of design expertise specializing in complex sensing and actuating devices. This expertise includes:
- understanding complex motion behavior in silicon
- predicting behavior of fine structures in various environments.
- creating innovative approaches to challenging design constraints.
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MEMSplus! experts use and understand simulation software capabilities and limitations.
- Before we cut silicon, design simulation presents probable behavior and highlights design elements for further consideration.
- During simulation, crucial requirements are emphasized:speed, risk management and cost reduction
- SIX SIGMA methodologies are used extensively to identify and focus efforts on reducing design element risks and exploiting their opportunities.
- Design margins are reviewed for future high volume production and cost control requirements.
The goal of process development is to establish a reliable processing recipe that leads to cost-effective, high-volume production. We have achieved that goal through:
- Highly trained and skilled personnel
- 300+ years of MEMS experience - 75+ years post-graduate
- Team-based approach to problem solving (Teams typically consist of Sr. Engineer, Engineer, Technician, and Operator)
- A strong commitment to the use of SIX SIGMA methodologies
Due to the inherently tight integration of MEMS design and process development, the MEMS Team maintains close coordination with you regarding project progress and process optimization.
This is where all the design and simulation efforts become a real, testable device!
Results from the prototype phase - process formulas, process capability and ideas for design, and process optimization - are documented with the customer.
This contributes to potential design improvements, and insures a smooth and effective transition to volume production.
MEMSplus! Service offers complete facilities for 4-INCH and 6-INCH wafer fabrication.
Because the success of a MEMS product typically depends on low-cost, high-yield production, it is crucial to insure
- run-to-run process repeatability
- across wafer process uniformity
- and wafer-to-wafer bonding alignment integrity.
Our extensive MEMS experience and SIX SIGMA tools create a production environment focused directly on these elements.
Honeywell test capabilities are well known and admired. MEMSplus! testing takes full advantage of this proven competency.
- Working with the device specification and schematics, we determine fixtures, set-ups and test sequences to exercise critical design features.
- Our SIX SIGMA culture insures a structured approach to test design while maintaining an emphasis on speed and cost reduction.
- Our aerospace legacy and ISO 9001 Certification (since 1995) reflects our understanding of robust test methods.
MEMSplus! packaging expertise is highly effective (recall the Honeywell longtime, industry-standard packaging expertise used for precision sensors and components)
- We offer on-site, thick-film hybrid design and manufacturing facilities, low temperature co-fired ceramic (LTCC) package design work
- The MEMS packaging team includes engineers from electrical, mechanical, environmental and test disciplines.
- We understand the demands packaging places on a product design: reliability, size, cost and speed
- You can expect Honeywell to work with you to achieve a package design that meets those demands.
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Our CAPABILITIES
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Honeywell MEMSplus! process capabilities
- speed time to volume production
- maximize device yield
- insure consistency of product quality
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Our EXPERIENCE
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30+ years quartz and silicon MEMS production, processing and packaging
- Expertise in all MEMS processes
- Robust production-ready processing
- 300+ years combined MEMS experience
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Our MEMS FOUNDRY
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State-of-the art, with 4-INCH and 6-INCH MEMS production lines
- Class 10 and Class 100 Cleanrooms
- Metrology for process control, SPC and Cpk
- High volume, automated tool set
- PROMIS MES and SPC
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Our QUALITY
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Performance sensitive product quality
- Certified to ISO9001 since 1995
- Certified to AS9100 since 1999
- Honeywell is recognized for use of Six Sigma to improve yields and reduce cost
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